diff --git a/packages/component-meta/lib/base.ts b/packages/component-meta/lib/base.ts
index 2c1a907e8b..4f13a1977d 100644
--- a/packages/component-meta/lib/base.ts
+++ b/packages/component-meta/lib/base.ts
@@ -152,6 +152,20 @@ export function baseCreate(
 	const vueLanguagePlugin = vue.createVueLanguagePlugin(
 		ts,
 		id => id,
+		fileName => {
+			if (ts.sys.useCaseSensitiveFileNames) {
+				return host.getScriptFileNames().includes(fileName) ?? false;
+			}
+			else {
+				const lowerFileName = fileName.toLowerCase();
+				for (const rootFile of host.getScriptFileNames()) {
+					if (rootFile.toLowerCase() === lowerFileName) {
+						return true;
+					}
+				}
+				return false;
+			}
+		},
 		host.getCompilationSettings(),
 		vueCompilerOptions,
 	);
diff --git a/packages/language-core/lib/generators/script.ts b/packages/language-core/lib/generators/script.ts
index ecca49d3ce..896764629a 100644
--- a/packages/language-core/lib/generators/script.ts
+++ b/packages/language-core/lib/generators/script.ts
@@ -437,7 +437,7 @@ type __VLS_PrettifyGlobal<T> = { [K in keyof T]: T[K]; } & {};
 				let propName = 'modelValue';
 				if (defineProp.name) {
 					propName = scriptSetup.content.substring(defineProp.name.start, defineProp.name.end);
-					propName = propName.replace(/['"]+/g, '')
+					propName = propName.replace(/['"]+/g, '');
 				}
 				yield _(`'update:${propName}': [${propName}:`);
 				if (defineProp.type) {
@@ -545,7 +545,7 @@ type __VLS_PrettifyGlobal<T> = { [K in keyof T]: T[K]; } & {};
 			}
 			yield _(`;\n`);
 
-			yield* generateModelEmits()
+			yield* generateModelEmits();
 
 			yield _(`let __VLS_fnPropsDefineComponent!: InstanceType<typeof __VLS_fnComponent>['$props'];\n`);
 			yield _(`let __VLS_fnPropsSlots!: `);
@@ -755,7 +755,7 @@ type __VLS_PrettifyGlobal<T> = { [K in keyof T]: T[K]; } & {};
 			yield _(`};\n`);
 		}
 
-		yield* generateModelEmits()
+		yield* generateModelEmits();
 		yield* generateTemplate(functional);
 
 		if (mode === 'return' || mode === 'export') {
@@ -856,9 +856,9 @@ type __VLS_PrettifyGlobal<T> = { [K in keyof T]: T[K]; } & {};
 				}
 				yield _(`},\n`);
 			}
-			yield _(`emits: ({} as __VLS_NormalizeEmits<typeof __VLS_modelEmitsType`)
+			yield _(`emits: ({} as __VLS_NormalizeEmits<typeof __VLS_modelEmitsType`);
 			if (ranges.emits.define) {
-				yield _(` & typeof `)
+				yield _(` & typeof `);
 				yield _(ranges.emits.name ?? '__VLS_emit');
 			}
 			yield _(`>),\n`);
diff --git a/packages/language-core/lib/languageModule.ts b/packages/language-core/lib/languageModule.ts
index 26fa4cf10b..58f4735cd2 100644
--- a/packages/language-core/lib/languageModule.ts
+++ b/packages/language-core/lib/languageModule.ts
@@ -1,24 +1,25 @@
 import { forEachEmbeddedCode, type LanguagePlugin } from '@volar/language-core';
 import type * as ts from 'typescript';
-import { createPluginContext, getDefaultVueLanguagePlugins } from './plugins';
+import { getDefaultVueLanguagePlugins } from './plugins';
 import type { VueCompilerOptions, VueLanguagePlugin } from './types';
-import { resolveVueCompilerOptions } from './utils/ts';
 import { VueGeneratedCode } from './virtualFile/vueFile';
+import * as CompilerDOM from '@vue/compiler-dom';
+import * as CompilerVue2 from './utils/vue2TemplateCompiler';
 
-const fileRegistries: {
+const normalFileRegistries: {
 	key: string;
 	plugins: VueLanguagePlugin[];
 	files: Map<string, VueGeneratedCode>;
 }[] = [];
+const holderFileRegistries: typeof normalFileRegistries = [];
 
-function getVueFileRegistry(key: string, plugins: VueLanguagePlugin[]) {
-
+function getVueFileRegistry(isGlobalTypesHolder: boolean, key: string, plugins: VueLanguagePlugin[]) {
+	const fileRegistries = isGlobalTypesHolder ? holderFileRegistries : normalFileRegistries;
 	let fileRegistry = fileRegistries.find(r =>
 		r.key === key
 		&& r.plugins.length === plugins.length
 		&& r.plugins.every(plugin => plugins.includes(plugin))
 	)?.files;
-
 	if (!fileRegistry) {
 		fileRegistry = new Map();
 		fileRegistries.push({
@@ -27,7 +28,6 @@ function getVueFileRegistry(key: string, plugins: VueLanguagePlugin[]) {
 			files: fileRegistry,
 		});
 	}
-
 	return fileRegistry;
 }
 
@@ -35,10 +35,8 @@ function getFileRegistryKey(
 	compilerOptions: ts.CompilerOptions,
 	vueCompilerOptions: VueCompilerOptions,
 	plugins: ReturnType<VueLanguagePlugin>[],
-	globalTypesHolder: string | undefined,
 ) {
 	const values = [
-		globalTypesHolder,
 		...Object.keys(vueCompilerOptions)
 			.sort()
 			.filter(key => key !== 'plugins')
@@ -53,21 +51,27 @@ function getFileRegistryKey(
 export function createVueLanguagePlugin(
 	ts: typeof import('typescript'),
 	getFileName: (fileId: string) => string,
-	compilerOptions: ts.CompilerOptions = {},
-	_vueCompilerOptions: Partial<VueCompilerOptions> = {},
+	isValidGlobalTypesHolder: (fileName: string) => boolean,
+	compilerOptions: ts.CompilerOptions,
+	vueCompilerOptions: VueCompilerOptions,
 	codegenStack: boolean = false,
-	globalTypesHolder?: string
 ): LanguagePlugin<VueGeneratedCode> {
-
-	const vueCompilerOptions = resolveVueCompilerOptions(_vueCompilerOptions);
 	const allowLanguageIds = new Set(['vue']);
-	const pluginContext = createPluginContext(
-		ts,
+	const pluginContext: Parameters<VueLanguagePlugin>[0] = {
+		modules: {
+			'@vue/compiler-dom': vueCompilerOptions.target < 3
+				? {
+					...CompilerDOM,
+					compile: CompilerVue2.compile,
+				}
+				: CompilerDOM,
+			typescript: ts,
+		},
 		compilerOptions,
 		vueCompilerOptions,
 		codegenStack,
-		globalTypesHolder,
-	);
+		globalTypesHolder: undefined,
+	};
 	const plugins = getDefaultVueLanguagePlugins(pluginContext);
 
 	if (vueCompilerOptions.extensions.includes('.md')) {
@@ -77,63 +81,59 @@ export function createVueLanguagePlugin(
 		allowLanguageIds.add('html');
 	}
 
-	let generatedCodeRegistry: Map<string, VueGeneratedCode> | undefined;
-
 	return {
 		createVirtualCode(fileId, languageId, snapshot) {
 			if (allowLanguageIds.has(languageId)) {
-
 				const fileName = getFileName(fileId);
-
-				if (!generatedCodeRegistry) {
-
-					pluginContext.globalTypesHolder ??= fileName;
-
-					generatedCodeRegistry = getVueFileRegistry(
-						getFileRegistryKey(compilerOptions, vueCompilerOptions, plugins, pluginContext.globalTypesHolder),
-						vueCompilerOptions.plugins,
-					);
+				if (!pluginContext.globalTypesHolder && isValidGlobalTypesHolder(fileName)) {
+					pluginContext.globalTypesHolder = fileName;
 				}
-
-				if (generatedCodeRegistry.has(fileId)) {
-					const reusedResult = generatedCodeRegistry.get(fileId)!;
-					reusedResult.update(snapshot);
-					return reusedResult;
+				const fileRegistry = getFileRegistry(pluginContext.globalTypesHolder === fileName);
+				const code = fileRegistry.get(fileId);
+				if (code) {
+					code.update(snapshot);
+					return code;
+				}
+				else {
+					const code = new VueGeneratedCode(
+						fileName,
+						languageId,
+						snapshot,
+						vueCompilerOptions,
+						plugins,
+						ts,
+						codegenStack,
+					);
+					fileRegistry.set(fileId, code);
+					return code;
 				}
-				const vueFile = new VueGeneratedCode(fileName, languageId, snapshot, vueCompilerOptions, plugins, ts, codegenStack);
-				generatedCodeRegistry.set(fileId, vueFile);
-				return vueFile;
 			}
 		},
-		updateVirtualCode(_fileId, vueFile, snapshot) {
-			vueFile.update(snapshot);
-			return vueFile;
+		updateVirtualCode(_fileId, code, snapshot) {
+			code.update(snapshot);
+			return code;
 		},
-		disposeVirtualCode(fileId, vueFile, files) {
-			generatedCodeRegistry?.delete(fileId);
-			if (vueFile.fileName === pluginContext.globalTypesHolder) {
-				if (generatedCodeRegistry?.size) {
-					for (const [fileName, file] of generatedCodeRegistry!) {
-						pluginContext.globalTypesHolder = fileName;
-
-						generatedCodeRegistry = getVueFileRegistry(
-							getFileRegistryKey(compilerOptions, vueCompilerOptions, plugins, pluginContext.globalTypesHolder),
-							vueCompilerOptions.plugins,
-						);
-
+		disposeVirtualCode(fileId, code, files) {
+			const isGlobalTypesHolder = code.fileName === pluginContext.globalTypesHolder;
+			const fileRegistry = getFileRegistry(isGlobalTypesHolder);
+			fileRegistry.delete(fileId);
+			if (isGlobalTypesHolder) {
+				pluginContext.globalTypesHolder = undefined;
+				const fileRegistry2 = getFileRegistry(false);
+				for (const [fileId, code] of fileRegistry2) {
+					if (isValidGlobalTypesHolder(code.fileName)) {
+						pluginContext.globalTypesHolder = code.fileName;
+						fileRegistry2.delete(fileId);
+						// force dirty
+						files?.delete(fileId);
 						files?.set(
 							fileId,
-							file.languageId,
-							// force dirty
-							{ ...file.snapshot },
+							code.languageId,
+							code.snapshot,
 						);
 						break;
 					}
 				}
-				else {
-					generatedCodeRegistry = undefined;
-					pluginContext.globalTypesHolder = undefined;
-				}
 			}
 		},
 		typescript: {
@@ -159,4 +159,12 @@ export function createVueLanguagePlugin(
 			},
 		},
 	};
+
+	function getFileRegistry(isGlobalTypesHolder: boolean) {
+		return getVueFileRegistry(
+			isGlobalTypesHolder,
+			getFileRegistryKey(compilerOptions, vueCompilerOptions, plugins),
+			vueCompilerOptions.plugins,
+		);
+	}
 }
diff --git a/packages/language-core/lib/plugins.ts b/packages/language-core/lib/plugins.ts
index 272af3bb9a..b749297219 100644
--- a/packages/language-core/lib/plugins.ts
+++ b/packages/language-core/lib/plugins.ts
@@ -1,5 +1,3 @@
-import * as CompilerDOM from '@vue/compiler-dom';
-import type * as ts from 'typescript';
 import useHtmlFilePlugin from './plugins/file-html';
 import useMdFilePlugin from './plugins/file-md';
 import useVueFilePlugin from './plugins/file-vue';
@@ -9,33 +7,7 @@ import useVueSfcStyles from './plugins/vue-sfc-styles';
 import useVueSfcTemplate from './plugins/vue-sfc-template';
 import useHtmlTemplatePlugin from './plugins/vue-template-html';
 import useVueTsx from './plugins/vue-tsx';
-import { pluginVersion, type VueCompilerOptions, type VueLanguagePlugin } from './types';
-import * as CompilerVue2 from './utils/vue2TemplateCompiler';
-
-export function createPluginContext(
-	ts: typeof import('typescript'),
-	compilerOptions: ts.CompilerOptions,
-	vueCompilerOptions: VueCompilerOptions,
-	codegenStack: boolean,
-	globalTypesHolder: string | undefined,
-) {
-	const pluginCtx: Parameters<VueLanguagePlugin>[0] = {
-		modules: {
-			'@vue/compiler-dom': vueCompilerOptions.target < 3
-				? {
-					...CompilerDOM,
-					compile: CompilerVue2.compile,
-				}
-				: CompilerDOM,
-			typescript: ts,
-		},
-		compilerOptions,
-		vueCompilerOptions,
-		codegenStack,
-		globalTypesHolder,
-	};
-	return pluginCtx;
-}
+import { pluginVersion, type VueLanguagePlugin } from './types';
 
 export function getDefaultVueLanguagePlugins(pluginContext: Parameters<VueLanguagePlugin>[0]) {
 
diff --git a/packages/language-server/node.ts b/packages/language-server/node.ts
index 4c8ff8a98f..a338da0c21 100644
--- a/packages/language-server/node.ts
+++ b/packages/language-server/node.ts
@@ -42,7 +42,27 @@ connection.onInitialize(async params => {
 			async getLanguagePlugins(serviceEnv, projectContext) {
 				const [commandLine, vueOptions] = await parseCommandLine();
 				const resolvedVueOptions = resolveVueCompilerOptions(vueOptions);
-				const vueLanguagePlugin = createVueLanguagePlugin(tsdk.typescript, serviceEnv.typescript!.uriToFileName, commandLine?.options ?? {}, resolvedVueOptions, options.codegenStack);
+				const vueLanguagePlugin = createVueLanguagePlugin(
+					tsdk.typescript,
+					serviceEnv.typescript!.uriToFileName,
+					fileName => {
+						if (projectContext.typescript?.sys.useCaseSensitiveFileNames ?? false) {
+							return projectContext.typescript?.host.getScriptFileNames().includes(fileName) ?? false;
+						}
+						else {
+							const lowerFileName = fileName.toLowerCase();
+							for (const rootFile of projectContext.typescript?.host.getScriptFileNames() ?? []) {
+								if (rootFile.toLowerCase() === lowerFileName) {
+									return true;
+								}
+							}
+							return false;
+						}
+					},
+					commandLine?.options ?? {},
+					resolvedVueOptions,
+					options.codegenStack,
+				);
 
 				envToVueOptions.set(serviceEnv, resolvedVueOptions);
 
diff --git a/packages/language-service/tests/utils/createTester.ts b/packages/language-service/tests/utils/createTester.ts
index f855c9f544..07fc9ab6fe 100644
--- a/packages/language-service/tests/utils/createTester.ts
+++ b/packages/language-service/tests/utils/createTester.ts
@@ -27,7 +27,26 @@ function createTester(rootUri: string) {
 		getLanguageId: resolveCommonLanguageId,
 	};
 	const resolvedVueOptions = resolveVueCompilerOptions(parsedCommandLine.vueOptions);
-	const vueLanguagePlugin = createVueLanguagePlugin(ts, serviceEnv.typescript!.uriToFileName, parsedCommandLine.options, resolvedVueOptions);
+	const vueLanguagePlugin = createVueLanguagePlugin(
+		ts,
+		serviceEnv.typescript!.uriToFileName,
+		fileName => {
+			if (ts.sys.useCaseSensitiveFileNames) {
+				return projectHost.getScriptFileNames().includes(fileName);
+			}
+			else {
+				const lowerFileName = fileName.toLowerCase();
+				for (const rootFile of projectHost.getScriptFileNames()) {
+					if (rootFile.toLowerCase() === lowerFileName) {
+						return true;
+					}
+				}
+				return false;
+			}
+		},
+		parsedCommandLine.options,
+		resolvedVueOptions,
+	);
 	const vueServicePlugins = createVueServicePlugins(ts, () => resolvedVueOptions);
 	const defaultVSCodeSettings: any = {
 		'typescript.preferences.quoteStyle': 'single',
diff --git a/packages/language-service/tests/utils/format.ts b/packages/language-service/tests/utils/format.ts
index dd9a1b2007..d1b5242766 100644
--- a/packages/language-service/tests/utils/format.ts
+++ b/packages/language-service/tests/utils/format.ts
@@ -4,7 +4,13 @@ import { describe, expect, it } from 'vitest';
 import { createVueLanguagePlugin, createVueServicePlugins, resolveVueCompilerOptions } from '../..';
 
 const resolvedVueOptions = resolveVueCompilerOptions({});
-const vueLanguagePlugin = createVueLanguagePlugin(ts, fileId => formatter.env.typescript!.uriToFileName(fileId), {}, resolvedVueOptions);
+const vueLanguagePlugin = createVueLanguagePlugin(
+	ts,
+	fileId => formatter.env.typescript!.uriToFileName(fileId),
+	() => false,
+	{},
+	resolvedVueOptions,
+);
 const vueServicePLugins = createVueServicePlugins(ts, () => resolvedVueOptions);
 const formatter = kit.createFormatter([vueLanguagePlugin], vueServicePLugins);
 
diff --git a/packages/tsc/index.ts b/packages/tsc/index.ts
index 4b0f79edd6..3b498fc9e6 100644
--- a/packages/tsc/index.ts
+++ b/packages/tsc/index.ts
@@ -2,11 +2,12 @@ import { runTsc } from '@volar/typescript/lib/quickstart/runTsc';
 import * as vue from '@vue/language-core';
 import type * as ts from 'typescript';
 
+const windowsPathReg = /\\/g;
+
 export function run() {
 
 	let runExtensions = ['.vue'];
 
-	const windowsPathReg = /\\/g;
 	const extensionsChangedException = new Error('extensions changed');
 	const main = () => runTsc(
 		require.resolve('typescript/lib/tsc'),
@@ -16,7 +17,9 @@ export function run() {
 			const vueOptions = typeof configFilePath === 'string'
 				? vue.createParsedCommandLine(ts, ts.sys, configFilePath.replace(windowsPathReg, '/')).vueOptions
 				: {};
-			const extensions = vueOptions.extensions ?? ['.vue'];
+			const resolvedVueOptions = vue.resolveVueCompilerOptions(vueOptions);
+			const { extensions } = resolvedVueOptions;
+			const fakeGlobalTypesHolder = createFakeGlobalTypesHolder(options);
 			if (
 				runExtensions.length === extensions.length
 				&& runExtensions.every(ext => extensions.includes(ext))
@@ -24,10 +27,10 @@ export function run() {
 				const vueLanguagePlugin = vue.createVueLanguagePlugin(
 					ts,
 					id => id,
+					fileName => fileName === fakeGlobalTypesHolder,
 					options.options,
-					vueOptions,
+					resolvedVueOptions,
 					false,
-					createFakeGlobalTypesHolder(options)?.replace(windowsPathReg, '/'),
 				);
 				return [vueLanguagePlugin];
 			}
@@ -77,6 +80,6 @@ export function createFakeGlobalTypesHolder(options: ts.CreateProgramOptions) {
 			return writeFile(fileName, ...args);
 		};
 
-		return fakeFileName;
+		return fakeFileName.replace(windowsPathReg, '/');
 	}
 }
diff --git a/packages/tsc/tests/dts.spec.ts b/packages/tsc/tests/dts.spec.ts
index 4caec8dbf1..3cf31c02e7 100644
--- a/packages/tsc/tests/dts.spec.ts
+++ b/packages/tsc/tests/dts.spec.ts
@@ -33,10 +33,10 @@ describe('vue-tsc-dts', () => {
 		const vueLanguagePlugin = vue.createVueLanguagePlugin(
 			ts,
 			id => id,
+			fileName => fileName === fakeGlobalTypesHolder,
 			options.options,
-			vueOptions,
+			vue.resolveVueCompilerOptions(vueOptions),
 			false,
-			fakeGlobalTypesHolder?.replace(windowsPathReg, '/'),
 		);
 		return [vueLanguagePlugin];
 	});
@@ -44,7 +44,7 @@ describe('vue-tsc-dts', () => {
 
 	for (const intputFile of options.rootNames) {
 
-		if (intputFile === fakeGlobalTypesHolder)
+		if (intputFile.endsWith('__VLS_globalTypes.vue'))
 			continue;
 
 		const expectedOutputFile = intputFile.endsWith('.ts')
diff --git a/packages/typescript-plugin/index.ts b/packages/typescript-plugin/index.ts
index 96325be49d..702b2839e8 100644
--- a/packages/typescript-plugin/index.ts
+++ b/packages/typescript-plugin/index.ts
@@ -9,7 +9,7 @@ import { _getComponentNames } from './lib/requests/componentInfos';
 import { capitalize } from '@vue/shared';
 
 const windowsPathReg = /\\/g;
-const externalFiles = new WeakMap<ts.server.Project, string[]>();
+const externalFiles = new WeakMap<ts.server.Project, Set<string>>();
 const projectExternalFileExtensions = new WeakMap<ts.server.Project, string[]>();
 const decoratedLanguageServices = new WeakSet<ts.LanguageService>();
 const decoratedLanguageServiceHosts = new WeakSet<ts.LanguageServiceHost>();
@@ -32,6 +32,20 @@ function createLanguageServicePlugin(): ts.server.PluginModuleFactory {
 					const languagePlugin = vue.createVueLanguagePlugin(
 						ts,
 						id => id,
+						fileName => {
+							if (info.languageServiceHost.useCaseSensitiveFileNames?.() ?? false) {
+								return externalFiles.get(info.project)?.has(fileName) ?? false;
+							}
+							else {
+								const lowerFileName = fileName.toLowerCase();
+								for (const externalFile of externalFiles.get(info.project) ?? []) {
+									if (externalFile.toLowerCase() === lowerFileName) {
+										return true;
+									}
+								}
+								return false;
+							}
+						},
 						info.languageServiceHost.getCompilationSettings(),
 						vueOptions,
 					);
@@ -204,26 +218,30 @@ function createLanguageServicePlugin(): ts.server.PluginModuleFactory {
 					|| !externalFiles.has(project)
 				) {
 					const oldFiles = externalFiles.get(project);
-					const newFiles = searchExternalFiles(ts, project, projectExternalFileExtensions.get(project)!);
+					const newFiles = new Set(searchExternalFiles(ts, project, projectExternalFileExtensions.get(project)!));
 					externalFiles.set(project, newFiles);
-					if (oldFiles && !arrayItemsEqual(oldFiles, newFiles)) {
+					if (oldFiles && !twoSetsEqual(oldFiles, newFiles)) {
+						for (const oldFile of oldFiles) {
+							if (!newFiles.has(oldFile)) {
+								projects.get(project)?.files.delete(oldFile);
+							}
+						}
 						project.refreshDiagnostics();
 					}
 				}
-				return externalFiles.get(project)!;
+				return [...externalFiles.get(project)!];
 			},
 		};
 		return pluginModule;
 	};
 }
 
-function arrayItemsEqual(a: string[], b: string[]) {
-	if (a.length !== b.length) {
+function twoSetsEqual(a: Set<string>, b: Set<string>) {
+	if (a.size !== b.size) {
 		return false;
 	}
-	const set = new Set(a);
-	for (const file of b) {
-		if (!set.has(file)) {
+	for (const file of a) {
+		if (!b.has(file)) {
 			return false;
 		}
 	}